THIN FILM FORMING DEVICE

专利名称：THIN FILM FORMING DEVICE发明人：KOBAYASHI TOSHIYUKI,OTOMO

YOSHIMI,KINOSHITA YOSHIMI,ODA MASAO

申请号：JP23953785申请日：19851028公开号：JPS6299475A公开日：19870508

摘要：PURPOSE:To perform film formation of a stabilized thin film for a long periodby providing a meshy plate material between a partition glass plate and a protective filmand running the protective film on the surface of the plate material. CONSTITUTION:In athin film forming device, a meshy plate material 16 large in the degree of aperture isprovided in an inserted state between a partition glass plate 2 and a protective film 4.The protective film 4 is run on the surface of this plate material 16. By this mechanism,both running impossibility caused because the protective film 4 is stuck on the plate 2and film formation impossibility caused because a reaction product is stuck on the plate 2are prevented. Therefore quantity of light reached on a base plate 8 is made much andthe stabilized film formation is performed over a long period.

申请人：MITSUBISHI ELECTRIC CORP

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